Vacuum UV Lamps

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Vacuum UV Lamps

D 200 high power vacuum UV (VUV) lamps are deuterium discharge lamps of 200 W electrical power. Important properties of the lamps are: directed UV radiation, a broad continuous spectrum between 160 nm and 400 nm, high UV radiation flux at 125 nm and 160 nm.

D 200 light sources with a spectral range between 160 nm and 400 nm have a wide field of applications in the laboratory and in production:

· Optical research with UV radiation

· Quality assurance in the semi-conductor industry

· UV interferometry

· UV spectroscopy at high radiation density

· UV absorption measurements

· Fluorescence excitation

· Photochemical analysis

D 200 vacuum UV lamps are used because of their high photon energy and the high optical resolution of the UV radiation at short wavelengths. The lamps offer a high radiation density, especially at 121/125 nm and 160 nm. At these short wavelengths, there is a high interaction of UV radiation with gas molecules. Consequently, the lamps can be used only under vacuum. Typical applications are: Vacuum UV (VUV) lamp - 9995 Bytes

· Lithography

· Quality assurance in the semi-conductor industry

· Fluorescence excitation

· Photochemical processes with high photon energy

Three different D 200 lamp models are designed for different spectral ranges by means of suitable window materials and specific construction.

D 200 F

D 200 F - replacement

D 200 F-HV

Available Vacuum UV Lamps

D 200 F-HV - replacement

D 200 VUV assembly

D 200 VUV

HPD2 (250 W)

HPD2 MGF (250 W)